AMAT Heat Exchanger
Load Lockscks main components:
- RF Generator(ENIENI OEM 12B)
- P5000 Mainframe with two process chambers.
- RF Cable
- Liquid Source
Robot Handler-Cassette Handler-Storage Elevator-Storage Elevator Wafer Orienter-Elevator Brakes-Load Lock Particle Reduction Kit-Load Lock Chamber Bolt Down Lids-Load Lock Lid Lift-Wafer Positioning Sensor-I/O Wafer Sensor.
AMAT Ozonator-Ozone Monitor-Liquid Source Delivery Cabinet-Wafer Cooling System-Turbo Flow Meter for both chambers-Endpoint System.
Minicontroller-Thermo Electric Drivers-Chamber Interconnect PCBs-ESC Controller Rack/Electronics-VME.
Mainframe type:208VAC 3 PHASE 50 HZ
AC Box type: 0010-09142 100A 480 VAC
High Purity Gas Panel.
0150-09027 25 ft
0150-09145 50 ft
0150-09109 50 ft
0150-09108 50 ft
0150-09107 50 ft
0150-09106 50 ft
0150-70036 55 ft qty 2
0150-75041A 40 ft Dryvac pump cables
CH 1 aux and gas 20ft
CH 3 aux and gas 25 ft
Edwards T1 pump controller panel for 3 process chambers and L/L.
Work carried out on the tool:
REPORT ON THE REFURBISHMENT MADE ON THE P5000
The objective of the work was centered in two
steps: check of the missing parts on the mainframe
components:cassette indexer-LLC-wafer transfer
chamber,both chambers C and D,major electronic
PCBs(looking for their power and signal connecting
cables) and the support equipments.
Missing parts: nothing to point out.
Cassette Indexer:check of the rotary actuator,optical
sensor,speed control valve,air lines,window crank and
turnbuckle,status of the cassette I/O window
Note: this component of the mainframe has all the
items present for its proper operation.
LLC Chamber: control of the wafer storage
elevator,control of the physical presence of the
centerfinder board,I/O slit valve.
Note: everything is present.
Wafer transfer chamber:from the upper side:check
wafer sensor and LED emitter,transfer robot,chambers
slit valves and from the bottom:check of the
actuactors(particularly look for the presence of air lines
close and open,reed switch magnetic,pneumatic
cylinder),lower part of the robot(essentially extension
and optical sensors,flag,rotation and extension
motor,rotation pulley,drive belt,winder gear.
Note: this important component of the system has all the parts in there.
Chamber C and D:all the process chambers have been
open.They were in bad conditons due to the fact that
they did not undergo the required decontamination
process when a tool has been turned off in the
manufacturing environment. Hazardous cleaning effort
has been performed.All the process kits are
present.The susceptor and its assembly status are
pretty good but the susceptor would need a further
reconditioning process before being able to hold a
wafer for process. Dismantle and re-install of the lamp
module,the RF matching box.
Note: both process chambers present no defects.
Major electronic subsystems:check of the presence of
the pcbs on the system controller and system
Conclusion: the gas panel has been only clean and the
gas line well fixed in the gas panel box.At the end,all
the P5000 underwent a cleaning process.The tool is
ready for being shipped.
**TM, Registered trade mark, Applied Materials Inc.