About Us

New Equipment
Division

Pre-Owned
Equipment
Division

AMAT P5000
AMAT Spare Parts
Diffusion
-Dispatch Conveyor
       Furnace Model
       14410-NS
Metrology
Ovens
Photolithography
Pumps
Solar
-ASM Epsilon 2000
       Epi Reactor
-Alcatel DRIE
-Dispatch Conveyor
       Furnace Model
       14410-NS
-Schmid Light
       Induced Plater (LIP)
-SELA Sample Prep
       for Failure Analysis
       for SEM and TEM
-EEJA (Electro Plating
       -Engineers of
        Japan) Ni and
        Ag Plating
        System
-Schmid Light
       Induced Plater (LIP)
-EVG101 Coater
-Thermco Maxibrute
       200mm Oxidation
       Furnace
-Spare Parts
-Vacuum
-Wet Process
-Additional
     Equipment

Contact Us

Home

   
 

AMAT PARTS (Available in single Lot only)

This lot of items consists of both brand new parts and parts that are not used, but cleaned with DI water

Item #  Part #  Description Qty. in Lot
1 --------- Chamber Assembly 1
2 3870-01034 Needle Valve 1
3 3400-01127 Flexible Tube 2
4 0150-76286 Heater Power Cable 1
5 0600-01014 Fan 1
6 0140-21013 Cable 1
7 0190-09419 Heater Driver 1
8 0010-09305 Throttle Valve 1
9 0050-25242 Foreline Manifold 1
10 3310-01081 Ion Gauge 1
11 3300-02240 FTG 2
14 3400-01057 Water hose to Chamber lid 1
16 3030-01413 MFC (gold) AR 500 SCCM 2
17 3870-01306 Pneumatic Valve 5
18 3870-01307 Manual Shut Off Valve 1
19 3870-01695 Air Actuated Valve 1
20 3870-01805 KF25 Manual valve 1
21 0150-20736 Pressure gauge 1
22 3310-01090 Pressure switch 1
23 0010-36417 Heater 1
24 0200-09995 Ring inner 1
25 0200-09997 Ring inner 1
26 0020-01049 Shield Cap 1
27 0190-09372 TC 1