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Schmid Light Induced Plater (LIP Plater)
 

-- Fowchart AG-LIP-Plater (1MB PDF)
-- AG-LIP-Plater (1MB PDF)

Technical Specification:

1. Technical Data

Machine Data:
Working width: 810 mm
Range of conveyor speed: 0.2 - 6.0 m/min
Working height: 1.000 mm
Working direction: right - left
Machine length: 4.750 mm
3 Phase alternating voltage: 480 V +/- 10%, 60 Hz
Control voltage: 24V

Wafer Data:
Thickness: 160 - 270?m
Format: 125 x 125 mm / 156 X 156mm
Gap between Wafers: 24 mm

Capacity:
Working speed: 0.30 m/min
Numbers of Tracks: 5
Capacity: approx. 500 Wafer / h

Notes
Control cabinet with connection cable to the machine - Included

  • All solenoid valves electropneumatic -- Included
  • Frequency Controlled Conveyor Drive -- Included
  • All components systems and subsystems will be "State of the art" to the best of our knowledge at the time of shipment.
2. Specification

2.1. Module Description
Item Quantity Description

1 MODULE 001 - INPUT
1.1 SW-TRE 2 - 500 mm consisting of:
1 - SW-TRE2 - PP/KB/Viton - Entry Module with emergency stop switch
1 - Service Unit for electropneumatic valves, includes pressure reducer and pressure control
1 - Lid for Entry Module
1 - Support foot plastic, with height adjustment
5 - Sensor with Fixing Device
1 - Encoder (impulse generator)

1.2 SW-Transport System consisting of:
1 - SW-TRE/TRA 2 - Wafer Transport System PP/KB/Viton
1 - Conveyor Drive 0.05 - 2.0 m/min continuously adjustable frequency-controlled with reluctance motor

2 MODULE 002 - AG- PLATING
2.1 SW-WMT-W 7 - 1.750 mm consisting of:
1 - SW-WMT-W 7 - Process Module PP/KB/EPDM with immersion zone, housing with integrated exhaust
1 - SW-Level Control Capacitive for dripping pan PTFE M12
1 - SW-Temperature Probe in PP/EPDM

1 - SW-Level Switch-Analogue 0-10 V, PP/EPDM
Includes 5 switch points
- Make-up level 1
- Make-up level 2
- Operating level max.
- Operating level

2 - SW-Door Control with interlock
12 - SW- Medium distribution pipe with hand valve top, PP/EPDM, d%
4 - SW - Flowmeter 230 - 2.300 l/h, PP/EPDM, d
24 - SW- LED-Galvanic lamp with dimmer, water cooling and electropneumatic valve d2 , PP/EPDM
12 - SW- Anode depo
2 - SW-Rectifier with 2 outputs
1 - SW-Lamp in Aggregate Chamber
1 - SW-Lamp in Process Chamber
1 - Flowmeter - 10,200l/h without digital display - for PLC use
1 - SW - Manual valve PP/EPDM d2

2.2 SW-Transport system consisting of:
1 - SW-WMT-W 7 - Wafer Transport system PP/KB/EPDM
24 - SW- WMT- W 12- Contact Rollers

2.3 SW-Tank System consisting of:
1 - SW-Tank - PP/EPDM
1 - SW-Ventilation PP/EPDM
1 - Pump - Magnetic pump 0.37 kW
1 - Frequency controller for max. 0.37 kW motors
1 - Pump - Magnetic pump 4.0 KW
1 - Frequency controller for max. 4 kW motors
1 - Filter - PP/EPDM COMpact S - 3 x 10" filter, quickexchange type,with electrical lid control
3 - Filter - Filter cartridge 1 ?m, PP
1 - SW- Heat exchanger 8kW cooling, PP/EPDM
1 - Flowmeter - 10,200l/h without digital display - for PLC use - PP/EPDM, d@
6 - SW-Electropneumatic Valve PP/EPDM d
5 - SW-Electropneumatic Valve PP/EPDM d2
2 - SW-Electropneumatic Valve PP/EPDM dP
1 - SW- Motor valve, PP/EPDM, d
1 - SW - Manual valve PP/EPDM d
2 - SW-Level Switch for Tank, PP/EPDM- max. max.
1 - SW-Level Switch-Analog 0-10 V, PP/Viton

Includes 5 switch points
- Make-up level 1
- Make-up level 2
- Operating level max.
- Operating level
- Level min.

2 - SW-Temperature Probe in PP/EPDM
1 - Pump - SW-Air Pump PTFE A 10 TTT
1 - SW-Electropneumatic Valve PP/EPDM d
1 - SW-Pressure Reducer with pressure gauge R 3/8"

2.4 SW-DI-Water Supply consisting of:
1 - SW - Manual valve PP/EPDM d
1 - SW-Electropneumatic Valve PP/EPDM d

2.5 SW-Bail-Out System consisting of:
1 - Pump - SW-Air Pump PE A 15 ETT
2 - SW-Electropneumatic Valve PP/EPDM d
1 - SW-Pressure Reducer with pressure gauge R 3/8"
1 - SW-Electropneumatic Valve PP/EPDM d%
3 - SW-Manual Valve PP/EPDM d%

2.6 SW-Dosing Container KOH consisting of:
1 - SW-Dosing Container PP/EPDM approx. 3 l
1 - SW-Level Switch for Tank, PP/EPDM - max. max.
1 - SW-Level Switch-Analogue 0-10 V, PP/EPDM for dosing tank
- Fill level
- Min. level
- Summation "consumption"
- free adjustable dosing quantity within 1 ml range
- dosing via panel counter, freely adjustable
2 - SW-Electropneumatic Valve PP/EPDM d
2 - SW-Flow Restrictor PP/EPDM d
1 - SW-Ventilation PP/EPDM

2.7 SW-Medium Measuring System consisting of:
1 - SW- Measuring tank with inlet and overflow (PP/EPDM)
1 - SW-Redox Measuring Device with PT 100 temperature probe and electrode
1 - SW-pH Measuring device complete with PT 1000 temperature probe and electrode
1 - SW-Electrode Flushing Device
1 - SW-Dosing Ball Valve with scale, PP/EPDM d
5 - SW-Electropneumatic Valve PP/EPDM d

2.8 SW-Hand Spray System consisting of:
1 - SW-Hand Shower with hose pipe in the front
1 - SW-Hand Shower with hose pipe at rear
1 - SW-Electropneumatic Valve PP/EPDM d

3 MODULE 003 - RINSE

3.1 SW-SM 6 - 1.500 mm consisting of:
1 - SW-SM 6 - PP/KB/EPDM - Cascade Rinse Module with housing and integrated exhaust
1 - SW-Level Control Capacitive for dripping pan PTFE M12
1 - SW-Door Control with interlock
1 - SW-Lamp in Process Chamber
1 - SW-Lamp in Aggregate Chamber

3.2 SW-Transport System consisting of:
1 - SW-SM 6 Wafer- Transport System, PP/KB/Viton

3.3 SW-Spray and Tank System consisting of:
12 - SW-PVC Spray Pipes with hand valve PP/Viton, d
3 - Covering Hood above spray pipes
1 - SW-Cascade Tank 3 x
3 - SW-Pump-Immersion Pump 0.37 kW
3 - SW-Strainer PP/Viton, d@
3 - Flowmeter - 10,200l/h without digital display - for PLC use
1 - SW-Level Switch for Tank, PP/EPDM
3 - SW - Manual valve PP/EPDM d2

3.4 SW-Inlet Pipe consisting of:
1 - SW - Flowmeter 16 - 160 l/h
1 - Flowmeter - Reed Contact Chain, with output signal 4 - 20 mA
2 - SW-Electropneumatic Valve PP/EPDM d
1 - SW - Manual valve PP/EPDM d

3.5 SW-Blow-Off System consisting of:
2 - SW-Blow Pipes with 56 nozzles at a distance of 15 mm
2 - SW-Dosing Ball Valve with scale, PP/EPDM d
1 - SW - Flowmeter 5 - 37.5 m/h
1 - Flowmeter - Reed Contact Chain, with output signal 4 - 20 mA
1 - SW-Electropneumatic Valve PP/EPDM d

3.6 SW-Bail-Out System consisting of:
1 - Tank - Solution Transfer Tank PP with immersion pump and level control

4 MODULE 004 - DRY

4.1 SW-TKM 3 - 750 mm consisting of:
1 - SW- TKM 3 - PP/KB/EPDM - Dryer Module with housing and integrated exhaust, temperature indication and Safety Thermostat
1 - SW-Level Control Capacitive for dripping pan PTFE M12
2 - SW-Door Control without interlock
1 - SW-Lamp in Process Chamber
1 - SW-Lamp in Aggregate Chamber

4.2 SW-TKM 3 - Transport System consisting of:
1 - SW3- Wafer Transport System PP/KB/EPDM

4.3 SW-Dryer System for Dryer SW-TKM 3 consisting of:
1 - TKM - Dry Jet with 1 blower 3.0 kW SS, including 1 air intake filter
1 - SW-Dry Jet Coated
1 - Frequency controller for max. 4 kW motors
1 - TKM - Air Filter, Pressure side for cleanroom use (Class H 14)
1 - SW - Flowmeter PP, dc (20 - 250 m/h)
1 - Flowmeter - Reed Contact Chain, with output signal 4 - 20 mA

5 MODULE 005 - EXIT

5.1 SW-TRA 2 - 250 mm consisting of:
1 - SW-TRA 1 - PP/KB/Viton - Exit Module Includes emergency stop switch
5 - Sensor with Fixing Device, fitted from the top

5.2 SW-Transport System consisting of:
1 - SW-TRE/TRA 1 - Wafer Transport System PP/KB/Viton

6 Replenish and Waste Treatment for the Complete System

6.1 SW-DI-Water Supply consisting of:
1 - SW-Pressure Reducer PP/Viton d%
1 - SW-Manual Valve PP/Viton d%
1 - SW-Electropneumatic Valve PP/Viton d%

6.2 SW-Inlet Fitting for complete line:
2 - SW - Manual valve PP/EPDM d
1 - Manual valve PP/Viton d

6.3 SW-Outlet Valves consisting of:
1 - SW - Manual valve PP/EPDM d2
1 - SW - Manual valve PP/EPDM d
1 - SW-Non-Return Valve, PP/EPDM, d2
1 - SW- dirt catcher, PP/EPDM, d2

7 ANCILLARIES
20 - Cable connection to control cabinet
1 - Lamp - Flash lamp 3 colours with buzzer
4.75 - SW-Floor Tray PP
4.75 - Piping to a central point
1 - SW-Coordination Product Design
1 - SW-Operating Panel Includes monitor, keyboard, emergency stop and control keys
1 - Wiring to UL-standard For a machine length over 5 m - version USA

2.3 Description of the Control System
PLC Siemens Simatic S7 for control of process machine Visualization for control of machine and visualization of process utilizing SchmidWATCH operation system. Operation and display in multiple languages.

Features:
- PC with 17" monitor for machine control according to specification
- Graphic display of machine
- Control of machine via PC keyboard, PC TouchPad and monitor
- Visualization of messages, warnings or alarms
- Recording of warnings and alarms on hard disk
- SPC trend data acquisition and viewing, storage of data on hard disk
- Weekly timer for programming of Start times, Stop times and Pre-heating times
- Storage of multiple recipes
- Input security with different password levels
- Reasonableness test of input values
- Possibility for connection to customer's internal network